| Photoelectric
Sensors for Wet Process |
|
1)
Self-Contained, Optical Leak Detector
2)
Foberoptic Leak Detection (Inherently Safe)
3)
HPQ-T Pipe Mounted, Self-Contained Liquid Leak Sensor
4)
Pipe mounted, Fiber Cable Type (Inherently Safe)
5) OMRON Liquid Leak Sensor
|
| Applications |
NetMotion carries
many different types of wet process sensing products that are
tailored to specific application needs. The illustration shows
the type of sensor that is typically used at each point in the
chemical management process.
There are many unique features and capabilities of each type
of sensor and this brochure will outline for you this information
so that you can determine if your specific application is similar
and will require the identified proposed solution.
Based on conversations with many OEM's, we have organized a
chart showing the general guidelines for leak detection and
part compatibility with both acidic and organic solvent liquids. |
Acids
No Metal or SUS Parts
No Explosive Fumes Present
PVC/CPVC Pan Material
Self-Contained Leak Detector
HPQ-D11/D12 Series
With CPCV Bracket
No Floating Head Detection Function |
Organic
Solvents
No Plastic Parts
Need Inherently Safe Design
SUS Pan Material
Fiberoptic Leak Detector
HPF-D040
With PFA and SUS grommet Bracket
Floating Head Detection Function |
In general, wafer cleaning trending towards more organic
solvents.
Of course, all of the above depends on the solution concentrations
and should only be used as a general guideline.
|
|
| SELF-CONTAINED,
OPTICAL LEAK DETECTOR |
The
HPQ-D leak detection sensor family is the first of its
kind to be constructed entirely of sealed, Teflon(r) PFA
material and be configured in a self-contained package
smaller than a quarter. It does not require a fiberoptic
amplifier to be used since there is a useable NPN or PNP
transistor output with each sensor. Typically, only 1ml
of liquid in contact with the optical focal point will
change the sensor's output. This enables early detection
of caustic chemical spills and can be used to shut
down the tool immediately, which minimizes the environmental
impact.
A large gain signal difference between no liquid and liquid
detection ensures low probability of false detection.
The fail safe design provides a normally closed output
that turns off when liquid is detected.
Easily viewable green LED signifies normal operation and
an orange LED turns on when liquid is detected and output
is shut off. The bracket assembly is made of CPVC material
and has an over/under patented style that assures solid
retention once locked down and the ability to remove the
sensor for maintenance or output checking.
The underside of bracket is flat and has perforated mounting
holes so you can mount with hardware or adhesive.
| Part
Numbers |
| HPQ-D11-L05 |
NPN
Output, 5 meter electrical cable
(USA Standard) |
| HPQ-D12-L05 |
PNP
Output, 5 meter electrical cable
(USA Standard) |
| HPQ-D11 |
NPN
Output, 2 meter electrical cable
(JAPAN Standard) |
| HPQ-D12 |
PNP
Output, 2 meter electrical cable
(JAPAN Standard) |
Floating
Head Detection
|
| Features
and Benefits |
- Sealed,
Chemically Resistant Materials - 13mm circular
sensor pancake lays on bottom of semiconductor
wet process tool and detects liquid leak or
spill by refraction light principle (see illustration
on this page).
- Body
is Teflon(r) PFA material with IP67 sealing
and the mounting bracket assembly is CPVC.
- 2
meters of PFA covers the sensing end of the
electrical cable.
- Quick
Detection Minimizes Environmental Impact and
Messy Cleanup - Typically, 1ml of liquid contact
with the optical focal point will trigger
the signal change.
- Fail
Safe Design - Output current is conducted
in normal dry conditions and will turn off
in the presence of liquid.
- The
sensor can be used with any pan material color.
- UL508
and CE approval by end of 2002.
- UL991
evaluation report based on applicable SEMI
S2 Standards will also be available.
- PNP
and NPN output versions are available.
- Condition
Indication Using Easy-to-View LED's - Green
LED indicates normal dry condition and proper
operation, orange LED indicates when liquid
is detected or operation is stopped.
- Low
Initial and Operational Cost - The HPQ-D series
is priced very aggressively and will require
little maintenance unlike other prevailing
technologies.
|
|
 |
 |
| Dimensions |
|
| Click
here to download the Self Contained, Optical Leak Detector dimensions
document. (PDF 701KB) |
| Schematics |
|
|
|
|
Wet
Process Parts & Applications |
| Specifications |
|
HPQ-D11
HPQ-D12
|
| Supply
Voltage |
12-24
VDC +/- 10% (Ripple 10% max.) |
| Current
Consumption |
30
milliamp max. |
| Usable
Pen |
CPVC,
Stainless Steel, etc. |
| Output
Mode |
NPN
Transistor
PNP Transistor |
| Output |
Load
Current 50 mA max(resistive load)
Saturation Voltage 1V max.
Short Circuit, False Pulse,
Reverse Polarity Protection. |
| Light
Source |
Red
LED (645 nm) |
| Indicator |
Green
ON: Normal Condition
Orange ON: Liquid Detection |
| Operating
temperature |
-25
to 50 Degree C |
| Storage
temperature |
-40
to 70 Degree C |
| Sealing |
IP67
(IEC Standard) |
|
|
| |
| FIBEROPTIC
LEAK DETECTION (INHERENTLY SAFE) |
The
HPF-D040 fiberoptic leak detector is inherently safe in
that there is no circuitry at the sensing point, only
light from the associated amplifier. The amplifier would
be mounted out of the immediate sensing area. The small
and narrow sensing head and bracket are composed of chemically
resistant Teflon(r) PFA material.
A detachable mounting bracket block with an integral 316SS
mounting grommet insures adequate retention while offering
easy maintenance capability. The 5 meters of cable length
has a 60 micron covering of PFA material that provides
chemical protection along with field cut-to-desired-length
ability.
Quick detection of spills is adjustable via the amplifier
used. 1ml of liquid typically is required to change the
amplifier's state. The fail safe design is achieved by
conducting light back to the amplifier when liquid is
not present. Liquid presence or a cable break will stop
the light from being returned. Unlike the self-contained
version and competitive offerings, the customer's pan
is used to stabilize and adjust the light return when
setting the amplifier. If the sensor becomes unattached
and no longer sees the pan reflection, the output will
turn off. We call this "floating head detection" capability. |
| Features
and Benefits |
- Sealed,
Chemically Resistant Materials - 13mm circular
sensor pancake lays on bottom of semiconductor
wet process tool and detects liquid leak
or spill by refraction light principle (see
illustration on this page).
- Inherently
Safe - Optical light is used from a remotely
mounted fiberoptic amplifier.
- Sealed,
chemically resistant materials - PFA housing
and bracket with 316SS mounting grommet.
- Quick
Detection minimizing environmental impact
and messy cleanup - typically, 1ml of liquid
contact with the optical focal point will
trigger the signal change. Sensitivity is
adjustable to some extent by the amplifier
used.
- Fail
Safe Design - Sensing light is conducted
from amplifier emitter, reflected off pan,
then returned to amplifier receiver. When
liquid is present or cable breaks, amplifier
changes state.
- Floating
Head Detection Capability - If the sensing
head becomes unattached from the pan, the
amplifier will change state. There is no
reflective surface included in the head
design.
|
Wet
Process Parts & Applications
|
|
| Dimensions |
| Click here
to download the Fiberoptic Leak Detection (Inherently Safe)
dimensions document. (PDF 432KB) |
| Usage
Notes |
- Handle
with care because the surfaces can be damaged
easily.
- Material
- Sensor Housing: PFA, Mounting Base: PFA, Grommet:
SUS316L, Fiber Cable: See "Viewed from A".
- Fiber
cables can be cut with an included tool FE-PA-F1.
- Depending
on color and viscosity of the liquid, no detection
can be made.
- Do
not make over-stress on the housing by pulling
the cables.
- Mounting
base can be detached from the sensor body.
|
|
| Specifications |
| Scanning
Type: |
Diffuse
Scan |
| Target: |
Liquid
Note:
Depending on color and viscosity of the liquid,
no detection can be made |
| Tensile
Strength: |
10N
max. |
| Bending
Radius: |
R20mm
min. |
| Operating
Temperature: |
-30+70
C |
| Amplifier
Unit: |
HPX-A,
HPX-H, HPX-ET, HPX-NT
(Letters and numbers depend on specifications) |
|
|
| |
| HPQ-T
PIPE MOUNTED, SELF-CONTAINED LIQUID SENSOR |
The
HPQ-T sensor is designed specifically for liquid level
detection by non-contact methods in clear or very translucent
pipes. The sensor is mounted on a pipe that is between
3 to 7mm or 8 to 13mm in diameter and features an infrared
light beam that becomes refracted and undetectable by
the receiver when the liquid is present. The device runs
on 10-28 VDC, has a response time of 2 msec max, has Light
Operate/ Dark Operate Selectable output functioning, and
has a 100 mA NPN or PNP output. There is minimal malfunction
when air bubbles or water droplets are present. The indicator
light is easy to view even when the sensors are gang mounted
as all the controls and adjustments are located on the
back side.
| Catalog
Listings |
| HPQ-T1 |
NPN
Output, 8-13mm O.D. pipe use, standard gain setting
for most applications. |
| HPQ-T2 |
PNP
Output, 8-13mm O.D. pipe use, standard gain setting
for most applications. |
| HPQ-T1-004 |
NPN
Output, 3-7mmO.D. pipe use, standard gain setting. |
| HPQ-T2-005 |
PNP
Output, 3-7mmO.D. pipe use, standard gain setting. |
| HPQ-T1-008 |
NPN
Output, 8-13mm O.D. pipe use, 25% gain reduction
from standard. |
| HPQ-T2-009 |
PNP
Output, 8-13mm O.D. pipe use, 25% gain reduction
from standard. |
|
| Features
and Benefits |
- Small
compact size and non-invasive sensing make
installation and height adjustment easy
- Many
products to select from - provides flexibility
to user
based on concerns
- Thru
scan principle where liquid refracts light
beam -
insures reliable detection
- Infrared
beam can help penetrate slurries and other
solids
with similar detection effect as water/liquid.
This can be
used in mixing sections of the process.
- Light
operate / dark operate selector switch provides
output
flexibility.
- Indicator
lamp is easy to view even when sensors are
gang mounted
|
| Usage
Recommendation |
The
standard gain setting versions work with most
liquids. The 25% gain reduction should be used
when large quantities of
bubbles are present or where mixing in chambers
requires the sensor to be able to detect water/fluid,
solids, and mixture of
solids/fluids equally. We recommend that the
prospective user evaluate their chemical combinations
and mixing situations to
determine which sensor works best before finalizing
the specification for use.
Wet
Process Parts & Applications
|
Dimensions:
Click
here to download the HPQ Pipe Mounted, Self Contained
Liquid Sensor dimensions document. (PDF 828KB)
|
|
 |
 |
|
| Specifications |
| NPN
Models
PNP Models |
| Scanning
Type |
Through
Scan |
| Supply
Voltage |
10
to 28 V DC (ripple 10% max.) |
| Current
consumption |
25
mA max. |
| Usable
Pipe |
see
catalog listing chart |
| Standard
detecting object |
Water
Note 1 |
| Repetitive
detecting agency |
1
mm max. |
| Operating
Mode |
Light-operated/dark-operated
selectable
(with L-On/D-On selector)
Detecting object: dark, Non-detecting object: light |
| Output |
Open
collector of NPN transistor |
Open
collector of PNP transistor |
| Response
time |
2ms
max. |
| Light
Source |
Infrared
LED |
| Indicator |
Red
"on" with detection |
| Ambient
Light |
Incandescent
1000 lx max. |
| Operating
temperature |
-10
~ +55°C |
| Storage
temperature |
-25
~ +70°C |
| Humidity |
35~85%
RH (without condensation) |
| Insulation
resistance |
20
M min. (at 500 V DC) |
| Dielectric
strength |
1000
V A 50/60 Hz 1 minute |
| Vibration |
10~55
Hz, 15 mm double amplitude, 2 hours in each direction
of X,Y,Z |
| Shock |
500
m/s2 (approx. 50g)
3 times in each direction of X,Y,Z |
| Sealing |
IP50
(IEC standard) |
| Mass |
Approx.
25g |
| Protection |
False
pulse protection (20ms type), reverse polarity protection |
| Approvals-CE
to be completed by end 2002 |
Note
1: The detection depends on the index of refraction
and the transparence rate of the pipe and the object
and the thickness of the pipe.
|
|
|
| PIPE
MOUNTED, FIBER CABLE TYPE LIQUID SENSOR (INHERENTLY SAFE) |
The
HPF-T032 fiber cable liquid sensor features a Fail Safe
design using an array style light beam. Unlike all know
competitive offerings, the HPF-T032 emitter/receiver arrangement
requires a beam refraction of 1.33 to 1.7 in order for
the light to be transmitted. This provides the utmost
prevention of false detection due to deposits on the inside
of the chemical piping. The array arrangement of the fibers
provides a much higher contrast signal level and the ability
to not be affected by bubbles of even 3mm size. The
housing is made from GE Ultem(r) plastic that is highly
resistant to most organic solvents and is capable of high
temperature exposure. The HPF-T032 sensor can be used
with pipe sizes from 1/8" to 1/2" (3-13mm) and the fiber
cutter and mounting hardware is shipped with each sensor.
A 60 micron covering of Teflon(r) PFA material protects
the 5 meter fiber length from chemical attack.
| Catalog
Listing |
| HPF-T032 |
5
meter Fiberoptic Cable Liquid Sensor
|
|
| Features
and Benefits |
- Fail
Safe Design (Semi S2 Compliant)
- Chemically
Resistant Materials
- Pipe
Size 1/8" to 1/2" (3-13mm)
- Uses
Multiple Beam Array - High Contrast Level
- Inherently
Safe - Optical Light
Wet
Process Parts & Applications
|
| Usage
Recommendation |
The
HPF-T032 fiber sensor has an outside fiber dimension
of 2.3mm. We recommend that the HPX-NT or the
HPX-ET series be used in conjunction with this
fiber to insure insertion ability without scraping
Teflon film upon insertion. The NT and ET sensor
series are visible red in nature so penetration
through slurries and ability to sense slurries
same as clear liquid may be limited. The HPF-T032
is not sealed from liquid penetration so care
should be taken to protect polycarbonate prisms
in sensing head from chemical attack. Please
request assistance from Yamatake for programming
options that will work in
your specific application.
|
|
| Dimensions |
| Click
here to download the Pipe Mounted, Fiber Cable Type
Liquid Sensor (Inherently Safe) dimensions document.
(PDF 602KB) |
|
| Specifications |
| Scanning
Type: |
Through
Scan |
| Amplifier
Unit: |
HPX-NT*,
HPX-T, HPX-ETS, HPX-H
*Setting
Mode: Ultra Long Distance/Standard |
| Usable
Pipe: |
PFA
Pipe
(Diameter
3-13mm, Thickness 1mm) |
| Standard
Detecting Liquid: |
Water
Note:
Sensing stability depends on the liquid characteristics
(color refractive index, viscous), so that it is
necessary to confirm the operation before using. |
| Operation
Mode: |
Detect
Liquid: Light
Non-Detect Liquid: Dark |
| Tensile
Strength: |
20N
max. (Fiber Cable) |
| Bending
Radius: |
R4
(Fiber Cable) |
| Operating
Temperature: |
-30
to 70°C |
|
| Usage
Notes |
- Handle
with care because the surfaces can be damaged
easily.
- Fiber
cables can be cut with included tool FE-PA-F1.
- Cutter
(1), Cord Ties (2) and Anti-Slip Tubes (2) are
included.
- Liquid
droplets or bubbles may cause incorrect operation.
- Sensing
stability depends on the liquid characteristics
(color refractive index, viscosity), so that
it is necessary to confirm the operation before
using.
- Material
- Case: PEI (Black), Inner Prism: PC (Clear),
Cord Tie: PA66 (Black), Anti-Slip Tube: Silicon
Resin (Black).
- This
fiber unit is not of water-proof structure.
|
|
|
|
|
| Overview Technical Specifications
Characteristics Ordering
Info Characteristics Chemical
Resistivity |
| KL7-AT50
Liquid
Leak Sensor Overview |
 |
| Click
on image
for bigger view |
 |
| Click
on image
for bigger view |
|
 |
Detects
leakage of liquid such as isopropyl alcohol by monitoring
the impedance between sensing bands. |
|
Detects
liquids with impedance as high as 50M . |
|
Four
selectable sensing ranges ensure detection sensitivity
suited to the characteristics of the liquid. |
|
Incorporates
a noise reduction circuit connected to a 3-conductor cable,
ensuring a high level of noise immunity and reliable operation.
(patent pending) |
|
Sends
AC signals to the sensing band, preventing electric corrosion.
|
|
The
power supply block and sensing band are isolated, allowing
the installation of more than one device in the same place. |
|
Thin-profile,
space-saving model is 13x29x46mm (WxHxD)
|
|
CE
and UL/CSA approval |
|
|
| Download
the OMRON Leak Sensor Brochure in Acrobat PDF(216KB)
(You
must have Acrobat
Reader to view the PDF files below) |
| Technical
Specifications |
| Rated
Power Supply Voltage |
12
to 24VDC (Allowable voltage fluctuation range: 1- to 3.0 VDC) |
| Operate
Impedance |
0
to 50,
variable
Range 0: 0 to 250 k
Range 1: 0 to 600 k
Range 2: 0 to 5 M
Range 3: 0 to 50 M
| Note:
|
Set
pins 1, 2, 3 of the DIP switch on the side of the Sensor
Amplifier tp the upwards position according to the range
to be selected. These pins, which are arranged in numerical
order from left to right, correspond to ranges 1 through
3. Be sure to set only the corresponding pin to the upward
position, Fpr range 0, set all these switches downwards.
The Adjuster (ADJUST) on the front panel allows impedance
changes from 0 to 
to the upper limit of the set range. The adjuster is set
to the upper limit as default. (Normally, the adjuster
should be set to the upper limit.) |
|
| Release
Impedance |
105%
min of of operate resistance |
| Output
Configuration |
NPN
open collector transistor output with 100mA at 30 VDC max.
| Note:
|
For
output OFF when liquid leakage is detected:
Set pin 4 of the DIP switch located on the side of the
Sensor Amplifier in the down position.
For output ON when liquid liquid leakage is detected
Set pin 4 of the DIP switch located on the side of the
Sensor Amplifier in the position |
|
| Wiring
Distance |
Wiring
cable: 50m max.
Sensing Band length: 10m max.
| Note:
|
These
values are possible on condition that a completely insulated
3-conductor VCT cable with a thickness of 0.75mm²
and a dielectric strength of 600V is used together with
a Liquid Sensing Band specifically by OMRON. (A 0.2mm²
cable can also be used.) |
|
| Accessories |
Terminal
block (for connecting wiring cable and Sensing Band)
Screwdriver for ADJUST setting
(Purchase the Sensing Band, Sensing Band Stickers, wiring cable,
and Socket separately.) |
|
| Characteristics |
| Ambient
Temperature |
Operating: -10ºC
to 55ºC (with no icing or condensation)
Storage: -25ºC to 65ºC |
| Ambient
Humidity |
Operating: -10ºC
to 55ºC(with no icing or condensation)
Storage: -25ºC to 65ºC |
| Insulation
Resistance |
10
M
at 100VDC between case and current-carrying parts |
| Dielectric
Strength |
1,000
VAC at 50/60 Hz for 1 min between case and current-carrying
parts |
| Power
Consumption |
1
VA max. |
| Response
Time |
Operate:
800 ms max.
Release: 800 ms max. |
| Weight
- Package |
Approx.
14g. |
|
| Ordering
Information |
| Description |
Part
No. |
Material |
| Liquid Leak Sensor |
F0316PE10 |
|
| Liquid
Leakage Sensor Amplifier |
K7LAT50 |
--- |
| Sensing
Band, 1-Meter |
F0316PE1 |
Sheath:
Polyethylene / Core: Stainless steel SUS316 |
| Sensing
Band, 2-Meter |
F0316PE2 |
|
| Sensing
Band, 5-Meter |
F0316PE5 |
|
| Sensing
Band, 25-Meter |
F0316PE25 |
|
| Sensing
Band Sticker with Adhesive |
F0326PE |
Polyethylene |
| Sensing
Band Sticker without Adhesive |
F0326PEN |
Polyethylene |
| Terminal
Block |
F0320 |
--- |
| Track-mounted
(DIN Rail) Socket |
P2RF08-E |
--- |
|
| Chemical
Resistivity for the Sensing Band (Reference Values) |
| Material |
F03-16PE |
| Sheath |
core |
| Polyethylene |
SUS316 |
| Water |
A (see below) |
A (see below)
|
| Acetone |
C |
A |
| ammonia |
A |
A |
| Ethanol |
B |
A |
| Hudrochloric
Acid |
A |
C |
| hydrogen Peroxide
Solution |
A |
A |
| Xylene |
B |
A |
| Cyclohexane |
C |
-- |
| Trichloroethylene |
C |
A |
| Toluene |
C |
B |
| Phenol |
B |
A |
| Butanol |
B |
-- |
| Fluorine |
A |
C |
| Hexane |
C |
-- |
| Benzene |
C |
A |
| Methanol |
B |
A |
| Sulfuric Acid |
C |
B |
| Phosphoric
Acid |
A |
B |
|
| Note: |
1. |
A: Not affected at
all or only very slightly affected |
| B: Slightly
affected but, depending on the conditions, sufficient for
use. |
| C: Affected but may
still be used. (Replace the sensing band immediately after detection.) |
|
2. |
In order to prevent
the secondary fire damage. consider the effect of the atmosphere
of the environment and the solution to be detected on the sensing
band. |
|
3. |
If the sensing band
changes shape or color when a liquid is detected, replace the
sensing band. |
|
|
