manual wafer wand for 4 x 4-inch and 6 x 6-inch square
substrates.The lockable tweezers are used in handling
alumna substrate and lithography mask handling applications.
The patent-pending design handles a fragile substrate
softly but firmly without excessive compression force.
A latching mechanism that locks the tweezers in the
holding position adds security in handling the delicate
substrate. The surfaces of the substrate are much less
likely to be scratched in contrast to conventional metal
tweezers. Also, the area that contacts wafer surfaces
is optically polished to reduce surface particles.
wands are available in virgin PEEK
for low particle emission and chemical compatibility,
for ESD protection, and polyphenylene sulfide (PPS).
The manual wands, or tweezers, are constructed without
glue or metallic parts and they can withstand up to
130ºC temperature continuously.