Vacuum Wand Accessories for Wafers, Die, Precision Parts Handling
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Vacuum Wands for Wafers (For ESD Protection)
Vacuum Wands for Wafers (Chemical Resistant Body)
Vacuum Wands for Die & Small/Precision Parts Handling
Vacuum Wands Kits (By Application)
Vacuum Pumps and Accessories
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 Vacuum Wand Tools & Accessories
 Check to see which best fit your needs. If you have any questions, please call for assistance at 1-800-790-7837 or e-mail sales@netmotion.com
Vacuum pump
HEPA filter kits for vacuum pumps
Wand body
Wand body valve types
Vacuum wand tips for semiconductor wafer handling:
Semiconductor Wafer Handling Wand Tips - ESD Safe Conductive PEEK™
Semiconductor Wafer Handling Wand Tips - PCTFE, PEEK™, Vespel® and Stainless
Wacuum wand tips for precision/ small parts handling
Vacuum wand stand
Static dissapative grounding kit (ESD safe cable)
ESD-safe tubing
Portable leak detector
Vacuum Wand replacement parts
Click here for pricing on all items
Diaphragm HEPA Vacuum Pump    Made in Japan

Click on the picture to the left for detailed drawing

FV-10 Specifications FVW-110 DuoVac Specifications FV-30 Specifications FV-60 Specifications
**Do not let the pump inhale dust or fluid. Click here for pricing Click here for pricing Click here for pricing Click here for pricing
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FV-10
Part Number FV-10
Pumping Power 2.8 l/ min
Variable Pressure -3kPa to -15kPa
Power Requirement 100-120 VAC **240VAC version (FV-10-240) available
Consumption Power 5.0 W
Dimensions (D x W x H)mm 155 x 72 x 54 mm
Weight 600 g
Price Click here for pricing
Recommended for precision parts, small die, beads, & fine objects
FVW-110 Duovac
Part Number FVW-110 Duovac
Pumping Power 1.2 l/min
Suction Power -30kPa
Variable Pressure Adjustable Blowing Power: 0-10kPa
Power Requirement 100-120 VAC **240VAC version (FV-10-240) available
Consumption Power 5.0 W
Duty Cycle Continuous
Life Expectancy 8760 hours
Dimensions (D x W x H)mm 137 x 88 x 85 mm
Weight 850 g
Price Click here for pricing
Ensures secure release of light-weight objects. Recommended for Specific Wand Bodies. Please call us.

PVC Double Tubing (Does not come with the pump)
FV-30
Part Number FV-30
Pumping Power 2.5 l/ min
Ultimate Pressure 300 mmHg
Power Requirement 100 VAC (* Can be changed upon request)
Consumption Power 5.0 W
Dimensions (D x W x H)mm 136 x 86 x 81 mm
Weight 800 g
Price Click here for pricing
Recommended for heavier objects & Wafer Sizes: 2", 4", 5"
(HEPA filter kit optional)
FV-60
Part Number FV-60
Pumping Power 2.5 l/ min
Ultimate Pressure 600 mmHg
Power Requirement 100 VAC (* Can be changed upon request)
Consumption Power 10.0 W
Dimensions (D x W x H)mm 136 x 88x 129mm
Weight of Pump 1200 g
Price Click here for pricing
Recommended for Wafer Sizes:
6", 8", 12"
(HEPA filter kit optional)
**Specifications are subject to change without notice. **Do not let the pump inhale dust or fluid.
 
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The Hepa Filter Window and HEPA filter kits
*HEPA filters trap 99.97% of all particles down to 0.3 microns.
HEPA Filter Kit Part Number Price per Kit
Filter kit for FV-10 (Inlet HEPA Filter) 809 Click here for pricing
Filter kit for FVW-110 -- --
Filter kit for FV-30 808 Click here for pricing
Filter kit for FV-60 808 Click here for pricing
Click here for more pricing
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Wand Body
C-Series (Conductive Nylon) ESD Safe
Wand Body Model# Valve Type
(see above)
Wand Material
C001 NC Conductive Nylon
C002 NO Conductive Nylon
C003 NO+SW Conductive Nylon
 
Click here for pricing
F-Series (Teflon)
Wand Body Model# Valve Type
(see above)
Wand Material
F001 NC Teflon®
F002 NO Teflon®
F003 NO+SW Teflon®
F007 NO+BLOW Teflon®
Click here for pricing
 
Wand Body Valve Type
NC
(Normally Closed)
NO
(Normally Open)
NO+SW
(Normally Open with Switch)
NO+Blow
(Normally Open w/Blow)
Push button to pick up the item
*Suggested for picking up smaller parts
Push button to release the item
*Suggested for picking up larger parts
Push the button to release the item (The switch maintain the system vacuum when not in use) Push the button to release the object then air is blown out.
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Wafer Handling Tips (ESD Safe)
Tips *Click on the numbers below for close-up view
90 91 92 98 95 96 97
 
More on Tips
Model Material Wafer Size(mm)
5" 6" 8" T W L1 L2
90-CP Conductive
PEEK™
    2.3 16 26 82
91-CP     2.3 26 33 89
92-CP     2.5 32 39 95
95-CP     2.7 15 28 37
96-CP     2.7 27 32 42
97-CP     3.6 31 37 43
98-CP     3.0 32 39 128
Selection Chart
C001-X C002-X C003-X C001-Y C002-Y C003-Y
90-CP
91-CP
92-CP
95-CP
96-CP
97-CP
98-CP
Available
***All C-Series Models Require ESD Tubing & Kit
Click here for pricing
 
Semiconductor Wafer Handling Wand Tips - PCTFE, PEEK, Vespel and Stainless
Tips *Click on the numbers below for close-up view
01 02 03 05
 06 09
  11 14 13
 
Material:
PCTFE PEEK™ Vespel®
3F PK VP
Stainless
SS
More on Tips
Model Wafer Size(mm)
Material 4" 5" 6" 8" 12" T W L1 L2
01- 3F/PK/VP 2.5 15 26 35
02- 3F/PK/VP 2.5 13 21 30
03- 3F/PK/VP 2.5 26 31 40
05- 3F/PK/VP 3.7 31 34 41
06- 3F/PK/VP 2.5 10 21 30
09- 3F/PK/VP 3.7 26 30 35
11- 3F/PK 3.2 15 25 77
13- SS 0.9 16 21 63
14- 3F/PK 2.6 31 34 86
15- 3F 3.4 47 55 162
15- PK 3 47 55 162
15- VP 3 51 61 180
Selection Chart
F001-X F002-X F003-X F001-Y F002-Y F003-Y F001-Z F002-Z F003-Z
01- 3F/PK/VP
02- 3F/PK/VP
03- 3F/PK/VP
05- 3F/PK/VP
06- 3F/PK/VP
09- 3F/PK/VP
11- 3F/PK
13- SS
14- 3F/PK
15- 3F/PK/VP
Available
***All C-Series Models Require ESD Tubing & Kit
Click here for pricing
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Tips and Attachments for Precision/ Small Parts Handling
Attachment Material Available
Nozzle
Part# Material
21-X (<0.3mm) PCTFE
22-X (>0.3mm) PCTFE
23-X PEEK™
24-X Vespel®
25-X Conductive PEEK™ (for 0.1 & 0.2mm ID only)
26-X Conductive PEEK™
27-X Conductive Nylon
31-X Stainless Steel
X = the the inner diameter of the nozzle, :
0.1, 0.2, 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0mm ( see below for OD info)
X 0.1 0.2 0.3 0.5 0.7 1.0 1.2 1.5 2.0 2.5 3.0
OD 0.4 0.5 0.7 0.9 1.1 1.4 1.6 1.9 2.4 2.9 3.4

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Cup
Part# Material
41-X Silicone Rubber
42-X Viton Rubber
43-X Conductive Silicone Rubber
X = the the diameter of the cup, :
2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0mm
Vacuum Wand Cup
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Slit-tip
Part# Material
51-X PCTFE
54-X Conductive Nylon
X = the width of the tip: 3.0, 4.5, 6.0, 7.0mm
The gap of the slit
:
0.5mm (X = 3.0, 4.5), 0.8mm (X = 6.0), 1.0mm (X = 7.0)

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Wand Stand  
For NC (normally Closed) & NO+SW (Normally Open with Switch) Valve
Vertical Mounting Horizontal Mounting
Part Number 651 Part Number 652
Click here for pricing Click here for pricing
Weight: 40g. Weight:106g
  • Made of conductive Nylon and Acrylic resin
  • 651 can be attached on the wall with double-sided adhesive tape/ screws.
  • Click on picture for detailed drawing
For NO (normally Open) Valve
Vertical Mounting Horizontal Mounting
Part Number 658 Part Number 659
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Weight: 51g. Weight:110g
  • Vacuum on/off stands
  • Made of conductive Nylon  and Acrylic resin
  • 651 can be attached on the wall with double-sided adhesive tape/ screws.
  • Click on pictures for detailed Drawing
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ESD Safe Kit - Grounding Cable and ESD- Safe Tubing **Required for all C-Series Wands
Grounding Cable (Part Number 858) Click here for pricing
Designed to be connected to FV-10/30/60-110/240 Vacuum Pump for effective ESD protection
 
ESD-Safe Tubing
Part Number Description Price each
850-L ESD Straight Tubing 100M Click here for pricing
850-M ESD Straight Tubing 100M Click here for pricing
Part Number Price each D1 D2 L1 L2 L3 Weight
851-L Click here for pricing 6mm 4mm 400mm 500mm 1000mm 118g
851-M Click here for pricing 5mm 3mm 400mm 500mm 1000mm 84g
  • No accumulation of static electricity
  • Prevents sparks Made of Conductive Polyurethanestmer
  • Surface Resistivity: 103 to 106 ohms/cm2
  • Volume Resistivity: 10 to 104 ohms-cm
  • Usable Temperature Range: -40 to +80C
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Portable Leak Detector
Part Number 901
  • Leak are detected by measuring the vacuum level
  • The area where wand tip is placed is made of PPS (Polyphenylenesulphide)
  • D:120 W:60 H:45(mm), Weight: 350g

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Other Replacement Parts
Click on the picture or links below to order replacement parts for your vacuum wand
Connector Body Tube Valve Button
Ball Seat Collect Chuck Cap Metal Tube
click the image above for more details
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Click here to request for NetMotion catalogs with complete list of products:
For further information, please contact NetMotion, Inc. at 1.800.790.7837 or 510.578.2814 or e-mail sales@netmotion.com
Copyright © 2003 NetMotion, Inc.