| Diaphragm
HEPA Vacuum Pump Made
in Japan
|
|
|
| FV-10 |
| Part
Number |
FV-10
|
| Pumping
Power |
2.8
l/ min |
| Variable
Pressure |
-3kPa
to -15kPa |
| Power
Requirement |
100-120
VAC **240VAC
version (FV-10-240) available |
| Consumption
Power |
5.0
W |
| Dimensions
(D x W x H)mm |
155
x 72 x 54 mm |
|
Weight |
600
g |
| Price |
Click
here for pricing |
|
 |
| Recommended
for precision parts, small die, beads, &
fine objects |
|
| FVW-110
Duovac |
| Part
Number |
FVW-110
Duovac |
| Pumping
Power |
1.2
l/min |
| Suction
Power |
-30kPa |
| Variable
Pressure |
Adjustable
Blowing Power: 0-10kPa |
| Power
Requirement |
100-120
VAC **240VAC
version (FV-10-240) available |
| Consumption
Power |
5.0
W |
| Duty
Cycle |
Continuous
|
| Life
Expectancy |
8760
hours |
| Dimensions
(D x W x H)mm |
137
x 88 x 85 mm |
|
Weight |
850
g |
| Price |
Click
here for pricing |
|
 |
Ensures
secure release of light-weight objects. Recommended
for Specific Wand Bodies. Please call us.
PVC
Double Tubing (Does not come with the pump)
|
|
| FV-30 |
| Part
Number |
FV-30 |
| Pumping
Power |
2.5
l/ min |
| Ultimate
Pressure |
300
mmHg |
| Power
Requirement |
100
VAC (* Can be changed upon request) |
| Consumption
Power |
5.0
W |
| Dimensions
(D x W x H)mm |
136
x 86 x 81 mm |
|
Weight |
800
g |
| Price |
Click
here for pricing |
|
 |
Recommended
for heavier objects & Wafer Sizes: 2",
4", 5"
(HEPA
filter kit optional)
|
|
| FV-60 |
| Part
Number |
FV-60 |
| Pumping
Power |
2.5
l/ min |
| Ultimate
Pressure |
600
mmHg |
| Power
Requirement |
100
VAC (* Can be changed upon request) |
| Consumption
Power |
10.0
W |
| Dimensions
(D x W x H)mm |
136
x 88x 129mm |
|
Weight of Pump |
1200
g |
| Price |
Click
here for pricing |
|
 |
Recommended
for Wafer Sizes:
6", 8", 12"
(HEPA
filter kit optional)
|
|
| **Specifications
are subject to change without notice. **Do
not let the pump inhale dust or fluid.
|
| |
Click
below to order:
go to top |
| The
Hepa Filter Window and HEPA filter kits |
| *HEPA filters trap
99.97% of all particles down to 0.3 microns. |
|
|
| Click
here for more pricing |
Click
below to order:
go
to top |
| |
| Wand
Body |
| C-Series
(Conductive Nylon) ESD Safe |
| Wand
Body Model# |
Valve
Type
(see above) |
Wand
Material |
| C001 |
NC |
Conductive
Nylon |
| C002 |
NO |
Conductive
Nylon |
| C003 |
NO+SW |
Conductive
Nylon |
|
| Click
here for pricing |
| F-Series
(Teflon) |
| Wand
Body Model# |
Valve
Type
(see above) |
Wand
Material |
| F001 |
NC |
Teflon® |
| F002 |
NO |
Teflon® |
| F003 |
NO+SW |
Teflon® |
| F007 |
NO+BLOW |
Teflon® |
|
 |
| Click
here for pricing |
| |
| Wand
Body Valve Type |
NC
(Normally Closed) |
NO
(Normally Open) |
NO+SW
(Normally Open with Switch) |
NO+Blow
(Normally Open w/Blow) |
 |
 |
 |
 |
Push
button to pick up the item
*Suggested for
picking up smaller parts |
Push
button to release the item
*Suggested for
picking up larger parts |
Push
the button to release the item (The
switch maintain the system vacuum when
not in use) |
Push
the button to release the object then
air is blown out. |
|
Click
below to order:
go
to top |
| |
| Wafer
Handling Tips (ESD
Safe) |
| Tips
*Click
on the numbers below for close-up view |
|
|
|
|
| |
| More
on Tips |
| Model |
Material |
Wafer |
Size(mm) |
| 5" |
6" |
8" |
T |
W |
L1 |
L2 |
| 90-CP |
Conductive
PEEK
|
 |
|
|
2.3 |
16 |
26 |
82 |
| 91-CP |
|
 |
|
2.3 |
26 |
33 |
89 |
| 92-CP |
|
|
 |
2.5 |
32 |
39 |
95 |
| 95-CP |
 |
|
|
2.7 |
15 |
28 |
37 |
| 96-CP |
|
 |
|
2.7 |
27 |
32 |
42 |
| 97-CP |
|
|
 |
3.6 |
31 |
37 |
43 |
| 98-CP |
|
|
 |
3.0 |
32 |
39 |
128 |
|
| Selection
Chart |
 |
C001-X |
C002-X |
C003-X |
C001-Y |
C002-Y |
C003-Y |
| 90-CP |
|
|
|
 |
 |
 |
| 91-CP |
|
|
|
 |
 |
 |
| 92-CP |
|
|
|
 |
 |
 |
| 95-CP |
 |
 |
 |
|
|
|
| 96-CP |
 |
 |
 |
|
|
|
| 97-CP |
 |
 |
 |
|
|
|
| 98-CP |
|
|
|
 |
 |
 |
|
|
Available
|
| ***All
C-Series Models Require ESD
Tubing & Kit |
| Click
here for pricing |
|
| |
| Semiconductor
Wafer Handling Wand Tips - PCTFE, PEEK, Vespel
and Stainless |
| Tips
*Click
on the numbers below for close-up view |
|
|
| More
on Tips |
| Model |
Wafer
|
Size(mm) |
|
Material |
4" |
5" |
6" |
8" |
12" |
T |
W |
L1 |
L2 |
| 01- |
3F/PK/VP |
|
|
 |
|
|
2.5 |
15 |
26 |
35 |
| 02- |
3F/PK/VP |
|
 |
|
|
|
2.5 |
13 |
21 |
30 |
| 03- |
3F/PK/VP |
|
|
 |
|
|
2.5 |
26 |
31 |
40 |
| 05- |
3F/PK/VP |
|
|
|
 |
|
3.7 |
31 |
34 |
41 |
| 06- |
3F/PK/VP |
 |
|
|
|
|
2.5 |
10 |
21 |
30 |
| 09- |
3F/PK/VP |
|
|
 |
|
|
3.7 |
26 |
30 |
35 |
| 11- |
3F/PK |
|
|
 |
|
|
3.2 |
15 |
25 |
77 |
| 13- |
SS |
|
 |
|
|
|
0.9 |
16 |
21 |
63 |
| 14- |
3F/PK |
|
|
|
 |
|
2.6 |
31 |
34 |
86 |
| 15- |
3F |
|
|
|
|
 |
3.4 |
47 |
55 |
162 |
| 15- |
PK |
|
|
|
|
 |
3 |
47 |
55 |
162 |
| 15- |
VP |
|
|
|
|
 |
3 |
51 |
61 |
180 |
|
| Selection
Chart |
 |
F001-X |
F002-X |
F003-X |
F001-Y |
F002-Y |
F003-Y |
F001-Z |
F002-Z | | | | |