| Wand
Body |
| C-Series
(Conductive Nylon) ESD Safe |
| Wand
Body Model# |
Valve
Type
(see above) |
Wand
Material |
| C001 |
NC |
Conductive
Nylon |
| C002 |
NO |
Conductive
Nylon |
| C003 |
NO+SW |
Conductive
Nylon |
|
| Click
here for pricing |
| F-Series
(Teflon) |
| Wand
Body Model# |
Valve
Type
(see above) |
Wand
Material |
| F001 |
NC |
Teflon® |
| F002 |
NO |
Teflon® |
| F003 |
NO+SW |
Teflon® |
| F007 |
NO+BLOW |
Teflon® |
|
 |
| Click
here for pricing |
| |
| Wand
Body Valve Type |
NC
(Normally Closed) |
NO
(Normally Open) |
NO+SW
(Normally Open with Switch) |
NO+Blow
(Normally Open w/Blow) |
 |
 |
 |
 |
Push
button to pick up the item
*Suggested for
picking up smaller parts |
Push
button to release the item
*Suggested for
picking up larger parts |
Push
the button to release the item (The
switch maintain the system vacuum when
not in use) |
Push
the button to release the object then
air is blown out. |
|
Click
below to order:
go
to top |
| |
| Wafer
Handling Tips (ESD
Safe) |
| Tips
*Click
on the numbers below for close-up view |
|
|
|
|
| |
| More
on Tips |
| Model |
Material |
Wafer |
Size(mm) |
| 5" |
6" |
8" |
T |
W |
L1 |
L2 |
| 90-CP |
Conductive
PEEK
|
 |
|
|
2.3 |
16 |
26 |
82 |
| 91-CP |
|
 |
|
2.3 |
26 |
33 |
89 |
| 92-CP |
|
|
 |
2.5 |
32 |
39 |
95 |
| 95-CP |
 |
|
|
2.7 |
15 |
28 |
37 |
| 96-CP |
|
 |
|
2.7 |
27 |
32 |
42 |
| 97-CP |
|
|
 |
3.6 |
31 |
37 |
43 |
| 98-CP |
|
|
 |
3.0 |
32 |
39 |
128 |
|
| Selection
Chart |
 |
C001-X |
C002-X |
C003-X |
C001-Y |
C002-Y |
C003-Y |
| 90-CP |
|
|
|
 |
 |
 |
| 91-CP |
|
|
|
 |
 |
 |
| 92-CP |
|
|
|
 |
 |
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| 95-CP |
 |
 |
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|
|
|
| 96-CP |
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 |
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|
|
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| 97-CP |
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|
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|
| 98-CP |
|
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|
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|
|
Available
|
| ***All
C-Series Models Require ESD
Tubing & Kit |
| Click
here for pricing |
|
| |
| Semiconductor
Wafer Handling Wand Tips - PCTFE, PEEK, Vespel
and Stainless |
| Tips
*Click
on the numbers below for close-up view |
|
|
| More
on Tips |
| Model |
Wafer
|
Size(mm) |
|
Material |
4" |
5" |
6" |
8" |
12" |
T |
W |
L1 |
L2 |
| 01- |
3F/PK/VP |
|
|
 |
|
|
2.5 |
15 |
26 |
35 |
| 02- |
3F/PK/VP |
|
 |
|
|
|
2.5 |
13 |
21 |
30 |
| 03- |
3F/PK/VP |
|
|
 |
|
|
2.5 |
26 |
31 |
40 |
| 05- |
3F/PK/VP |
|
|
|
 |
|
3.7 |
31 |
34 |
41 |
| 06- |
3F/PK/VP |
 |
|
|
|
|
2.5 |
10 |
21 |
30 |
| 09- |
3F/PK/VP |
|
|
 |
|
|
3.7 |
26 |
30 |
35 |
| 11- |
3F/PK |
|
|
 |
|
|
3.2 |
15 |
25 |
77 |
| 13- |
SS |
|
 |
|
|
|
0.9 |
16 |
21 |
63 |
| 14- |
3F/PK |
|
|
|
 |
|
2.6 |
31 |
34 |
86 |
| 15- |
3F |
|
|
|
|
 |
3.4 |
47 |
55 |
162 |
| 15- |
PK |
|
|
|
|
 |
3 |
47 |
55 |
162 |
| 15- |
VP |
|
|
|
|
 |
3 |
51 |
61 |
180 |
|
| Selection
Chart |
 |
F001-X |
F002-X |
F003-X |
F001-Y |
F002-Y |
F003-Y |
F001-Z |
F002-Z |
F003-Z |
| 01- |
3F/PK/VP |
 |
 |
 |
|
|
|
 |
 |
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| 02- |
3F/PK/VP |
 |
 |
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|
|
|
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| 03- |
3F/PK/VP |
 |
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|
|
|
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| 05- |
3F/PK/VP |
 |
 |
 |
|
|
|
 |
 |
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| 06- |
3F/PK/VP |
 |
 |
 |
|
|
|
 |
 |
 |
| 09- |
3F/PK/VP |
 |
 |
 |
|
|
|
 |
 |
 |
| 11- |
3F/PK |
|
|
|
 |
 |
 |
|
|
|
| 13- |
SS |
 |
 |
 |
|
|
|
|
|
|
| 14- |
3F/PK |
|
|
|
 |
 |
 |
|
|
|
| 15- |
3F/PK/VP |
|
|
|
 |
 |
 |
|
|
|
|
Available
|
|
| ***All
C-Series Models Require ESD
Tubing & Kit |
| Click
here for pricing |
|
Click
below to order:
go
to top |
| |
| Tips
and Attachments for Precision/ Small
Parts Handling |
| Attachment
|
Material
Available |
| Nozzle |
| Part# |
Material |
| 21-X
(<0.3mm)
|
PCTFE |
| 22-X
(>0.3mm)
|
PCTFE |
| 23-X |
PEEK |
| 24-X |
Vespel® |
| 25-X |
Conductive
PEEK (for
0.1 & 0.2mm ID only) |
| 26-X |
Conductive
PEEK |
| 27-X |
Conductive
Nylon |
| 31-X |
Stainless
Steel |
X
= the the
inner diameter of the nozzle,
:
0.1, 0.2, 0.3, 0.5, 0.7, 1.0,
1.2, 1.5, 2.0, 2.5, 3.0mm ( see
below for OD info)
|
| X |
0.1 |
0.2 |
0.3 |
0.5 |
0.7 |
1.0 |
1.2 |
1.5 |
2.0 |
2.5 |
3.0 |
| OD |
0.4 |
0.5 |
0.7 |
0.9 |
1.1 |
1.4 |
1.6 |
1.9 |
2.4 |
2.9 |
3.4 |
|
|

Click
here for pricing
|
| Cup |
| Part# |
Material |
| 41-X |
Silicone
Rubber |
| 42-X |
Viton
Rubber |
| 43-X |
Conductive
Silicone Rubber |
X
= the the
diameter of the cup, :
2.5, 3.0, 3.5, 5.0, 8.0, 11.0,
15.0mm
|
|

Click
here for pricing
|
| Slit-tip |
|

Click
here for pricing
|
|
Click
below to order:
go
to top |
| |
| Wand
Stand |
|
|
| Click
here for pricing on all parts |
Click
below to order:
go
to top |
| ESD
Safe Kit - Grounding Cable and ESD- Safe Tubing
**Required
for all C-Series Wands
|
|
|
|
| Designed
to be connected to FV-10/30/60-110/240
Vacuum Pump for effective ESD protection
|
| |
| ESD-Safe
Tubing |
|
|
- No
accumulation of static electricity
- Prevents
sparks Made of Conductive Polyurethanestmer
-
Surface Resistivity: 103 to 106
ohms/cm2
- Volume
Resistivity: 10 to 104 ohms-cm
- Usable
Temperature Range: -40º to +80ºC
|
|
| Click
here for pricing on all parts |
Click
below to order:
go
to top |
| |
| Portable
Leak Detector |
| Part
Number 901 |
 |
- Leak
are detected by measuring
the vacuum level
- The
area where wand tip is placed
is made of PPS (Polyphenylenesulphide)
- D:120
W:60 H:45(mm), Weight: 350g
Click
here for pricing on all parts
|
|
| |
| Other
Replacement Parts |
| Click
on the picture or links below to order
replacement parts for your vacuum wand
|
|
|
|