Standard Ceramic End-Effectors / Wafer Chucks/ End Effectors/ Robotic Arm/ Endeffector
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Why Use Ceramic?
Ceramics have superior mechanical, electrical, and thermal properties ideal for quality components. the durability of fine ceramics makes it ideal for mechanical and thermal loads that are abrasive and in chemically harsh environment.
  • Standard paddle and fork designs
  • For 4", 5", 6", 8" and 12" wafers
  • Vacuum and non-vacuum
  • High temperature resistance
  • Chemical resistance
  • Durable and reliable


Standard 12" and 8" Teflon® Coated Alumina End-Effectors
Download/View Video Clip (MPEG File 3.8MB)

Standard Alumina Paddle Design 4"~12" Standard Alumina Fork Design 4" ~ 8"
Size Part Number
4" CEFV04PA
6" CEFV06PA
8" CEFV08PA
12" CEFV12PA
Size Part Number
4" CEFV04FK
6" CEFV06FK
8" CEFV08FK
Type of Ceramic Purity Color Vacuum Non-Vacuum
Alumina 99.5% White Yes Yes
Alumina 99.6% Cream Yes Yes
Alumina 99.9% Cream No Yes
Silicon Carbide (SiC) 98.0% Black Yes Yes
 
Properties & Application Note
 
Ceramic End-Effector Properties
Properties Alumina Silicon Carbide (SiC)
Purity 99.9% 99.6% 99.5% 98.0%
Chemical Composition A1203 A1203 A1203 SiC
Color Ivory Dark Ivory White Black
Density (g/cm3) 3.95 3.94 3.94 3.14
Flexural Strength (kg/mm2) 40 38 45 51
Vicker Hardness 1,800 1,500 1,500 3,100
Young Ratio (104kgf/mm2) 3.9 4 3.9 4.2
Composition Strength (MN/m3/2) 4 4 4 2.4
Coefficient of Thermal Expansion (10-6) 7.9 8 8 3.4
Thermal Conductivity (Cal/sec/cm) 0.07 0.07 0.07 0.33
Volume Resistivity (>&=cm) >10-14 >10-14 >10-14 106
Dielectric Constant 10.5 11 11.5 --
Dissipation Factor (10-4MHz) -- 8.0 4.8 --
Breakdown voltage (kv/mm) 15 13 15 --
Application Note

In robotics, an end-effector is a device or toll connected to the end of a robot arm. The structure of an end effector (see figure on the left and right), and the nature of the programming and hardware that drives it, depends on the intended task.

A robot arm can accommodate only certain end-effector task modes without changes to the ancillary hardware and/or programming. It is not possible to directly replace a gripper with a screwdriver head, for example, and expect a favorable result. It is necessary to change the programming of the robot controller and use a different set of end-effector motors to facilitate torque rather than gripping force. Then the gripper can be replaced with a driver head.

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