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Silicon Wafers

WAFERS	SPECIFICATION	AVAILABLE SIZE
		3"	4"	5"	6"	8"	12"
Bear Wafer
Monitor Wafer	Furnace Monitor
	Lithograph Monitor
	Mechanical Monitor
Dummy Wafer	Coin Roll
Solar Wafer	1"omega"CM =<

Thin Films

FILM	THICKNESS	AVAILABLE SIZE
		4"	5"	6"	8"	12"
Thermal Oxide	20 - 2500
PE-CVD TEOS	100 - 1500
LP-CVD NITRIDE	50 - 300
PE-CVD NITRIDE	100 - 1200
BPSG / PSG
Poly-Si (Non Doping)	50 - 500
AP-CVD Oxide	100 - 800
EPI	1µm - 20µm
Al	100 - 500
AL-Si	100 - 500
AL-Si-Cu	100 - 500
Al-Cu	100 - 500
Ti	100 - 500
TiN	100 - 500
Ta	100 - 500
TaN	100 - 500
W-Si (CVD)	100 - 500
Cu	100 - 500
Au	100 - 500
Poly imide
SOG
Resist Coat	100 - 3000
Ion Plant
Low-k
		4"	5"	6"	8"	12"

Test Wafers

TEST PATTERN	PROCESS	AVAILABLE SIZE
		4"	5"	6"	8"	12"
CMP TEST	ILD
	STI
	W
	Cu

* Available only in USA.

SILICON -- STANDARD THICKNESS (100) 1-20 OHM-CM. 2 FLATS<110>

DIAM. TYPE ORIENT. RES. THICK. SURFACE GRADE

1" P (100) 1-20 OHM-CM. 250-350 MIC. 1-SIDE TEST

1" N (100) 1-20 OHM-CM. 250-350 MIC. 1-SIDE TEST

1" P (100) 1-20 OHM-CM. 200-250 MIC. 2-SIDE TEST

1" N (100) 1-20 OHM-CM. 200-250 MIC. 2-SIDE TEST

(1" WAFERS HAVE NO FLATS)

2" P (100) 1-20 OHM-CM. 250-300 MIC. 1-SIDE TEST

2" P (100) 1-20 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" N (100) 1-20 OHM-CM. 250-300 MIC. 1-SIDE TEST

2" N (100) 1-20 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" P (100) 1-20 OHM-CM. 225-275 MIC. 2-SIDE PRIME

2" N (100) 1-20 OHM-CM. 225-275 MIC. 2-SIDE PRIME

3" P (100) 1-20 OHM-CM. 350-400 MIC. 1-SIDE TEST

3" P (100) 1-20 OHM-CM. 350-400 MIC. 1-SIDE PRIME

3" N (100) 1-20 OHM-CM. 350-400 MIC. 1-SIDE TEST

3" N (100) 1-20 OHM-CM. 350-400 MIC. 1-SIDE PRIME

3" P (100) 1-20 OHM-CM. 300-350 MIC. 2-SIDE PRIME

3" N (100) 1-20 OHM-CM. 300-350 MIC. 2-SIDE PRIME

4" P (100) 1-20 OHM-CM. 475-575 MIC. 1-SIDE TEST

4" P (100) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

4" N (100) 1-20 OHM-CM. 475-575 MIC. 1-SIDE TEST

4" N (100) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

4" P (100) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

4" N (100) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

5" P (100) 1-20 OHM-CM. 550-650 MIC. 1-SIDE TEST

5" P (100) 1-20 OHM-CM. 500-600 MIC. 2-SIDE PRIME

5" N (100) 1-20 OHM-CM. 550-650 MIC. 1-SIDE TEST

5" N (100) 1-20 OHM-CM. 500-600 MIC. 2-SIDE PRIME

SILICON-STANDARD THICKNESS (111) 1-20 OHM-CM. SEMI-STANDARD FLATS

DIAM. TYPE ORIENT. RES. THICK. SURFACE GRADE

2" P (111) 1-20 OHM-CM. 250-300 MIC. 1-SIDE TEST

2" P (111) 1-20 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" P (111) 1-20 OHM-CM. 225-275 MIC. 2-SIDE PRIME

2" N (111) 1-20 OHM-CM. 250-300 MIC. 1-SIDE TEST

2" N (111) 1-20 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" N (111) 1-20 OHM-CM. 225-275 MIC. 2-SIDE PRIME

3" P (111) 1-20 OHM-CM. 350-400 MIC. 1-SIDE TEST

3" P (111) 1-20 OHM-CM. 300-350 MIC. 2-SIDE PRIME

3" N (111) 1-20 OHM-CM. 350-400 MIC. 1-SIDE TEST

3" N (111) 1-20 OHM-CM. 300-350 MIC. 2-SIDE PRIME

3" P (111) 1-20 OHM-CM. 350-400 MIC. 1-SIDE PRIME

3" N (111) 1-20 OHM-CM. 350-400 MIC. 1-SIDE PRIME

4" P (111) 1-20 OHM-CM. 475-575 MIC. 1-SIDE TEST

4" P (111) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

4" P (111) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

4" N (111) 1-20 OHM-CM. 475-575 MIC. 1-SIDE TEST

4" N (111) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

4" N (111) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

SILICON-STANDARD THICKNESS (110) 1-20 OHM-CM. 2 <111> FLATS

DIAM. TYPE ORIENT. RES. THICK. SURFACE GRADE

2" P (110) 1-20 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" P (110) 1-20 OHM-CM. 225-275 MIC. 2-SIDE PRIME

2" N (110) 1-20 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" N (110) 1-20 OHM-CM. 225-275 MIC. 2-SIDE PRIME

3" P (110) 1-20 OHM-CM. 350-400 MIC. 1-SIDE PRIME

3" P (110) 1-20 OHM-CM. 300-350 MIC. 2-SIDE PRIME

3" N (110) 1-20 OHM-CM. 350-400 MIC. 1-SIDE PRIME

3" N (110) 1-20 OHM-CM. 300-350 MIC. 2-SIDE PRIME

4" P (110) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

4" P (110) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

4" N (110) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

4" N (110) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

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SILICON-- ODD THICKNESS (100) 1-20 OHM-CM. 2<110> FLATS

DIAM. TYPE ORIENT. RES. THICK. SURFACE GRADE

2" P (100) 1-20 OHM-CM. 200-250 MIC. 1-SIDE PRIME

2" P (100) 1-20 OHM-CM. 200-250 MIC. 2-SIDE PRIME

2" P (100) 1-20 OHM-CM. 350-400 MIC. 1-SIDE PRIME

2" P (100) 1-20 OHM-CM. 275-325 MIC. 2-SIDE PRIME

2" P (100) 1-20 OHM-CM. 475-575 MIC. 1-SIDE PRIME

2" P (100) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

2" N (100) 1-20 OHM-CM. 200-250 MIC. 1-SIDE PRIME

2" N (100) 1-20 OHM-CM. 200-250 MIC. 2-SIDE PRIME

2" N (100) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

2" N (100) 1-20 OHM-CM. 300-350 MIC. 2-SIDE PRIME

3" P (100) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

3" P (100) 1-20 OHM-CM. 450-500 MIC. 2-SIDE PRIME

3" N (100) 1-20 OHM-CM. 600-700 MIC. 1-SIDE PRIME

3" N (100) 1-20 OHM-CM. 550-650 MIC. 2-SIDE PRIME

3" N (100) 1-20 OHM-CM. 500-550 MIC. 1-SIDE PRIME

3" N (100) 1-20 OHM-CM. 475-525 MIC. 2-SIDE PRIME

4" P (100) 1-20 OHM-CM. 300-350 MIC. 1-SIDE PRIME

4" P (100) 1-20 OHM-CM. 275-350 MIC. 2-SIDE PRIME

4" N (100) 1-20 OHM-CM. 300-350 MIC. 1-SIDE PRIME

4" N (100) 1-20 OHM-CM. 275-350 MIC. 2-SIDE PRIME

SILICON 3" & 4" LOW TTV DOUBLE-SIDE POLISH

TTV <5 please ask.

TTV <2

TTV <1

IF YOU REQUIRE A SPECIFIC THICKNESS FOR YOUR LOW TTV WAFERS, PLEASE ASK FOR MORE DETAILS.

SILICON- STANDARD THICKNESS (100) SPECIFIED RESISTIVITY RANGE <1 OHM-CM. BELOW:

<1 P(100) .02-1 DOPANT IS BORON <1 N(100) .02-.1 DOPANT IS PHOSPHORUS

<1 P(100) .005-.02 DOPANT IS BORON < 1 N(100) .005-.02 DOPANT IS ANTIMONY PRICE

<1 P(100) .001-.005 DOPANT IS BORON <1 N(100) .001-.005 DOPANT IS ARSENIC (1000+PCS)

DIAM. TYPE ORIENT. RES. THICK. SURFACE GRADE

2" P (100) <1 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" P (100) <1 OHM-CM. 225-275 MIC. 2-SIDE PRIME

2" N (100) <1 OHM-CM. 250-300 MIC. 1-SIDE PRIME

2" N (100) <1 OHM-CM. 225-275 MIC. 2-SIDE PRIME

3" P (100) <1 OHM-CM. 350-400 MIC. 1-SIDE PRIME

3" P (100) <1 OHM-CM. 300-350 MIC. 2-SIDE PRIME

3" N (100) <1 OHM-CM. 350-400 MIC. 1-SIDE PRIME

3" N (100) <1 OHM-CM. 300-350 MIC. 2-SIDE PRIME

DIAM. TYPE ORIENT. RES. THICK. SURFACE GRADE

(4" UNSPECIFIED RESISTIVITY)

4" P (100) <1 OHM-CM. 475-575 MIC. 1-SIDE TEST

4" P (100) <1 OHM-CM. 450-500 MIC. 2-SIDE PRIME

4" N (100) <1 OHM-CM. 475-575 MIC. 1-SIDE TEST

4" N (100) <1 OHM-CM. 450-500 MIC. 2-SIDE PRIME

(4" WITH SPECIFIC RESISTIVITY)

4" P (100) <1 OHM-CM. 475-575 MIC. 1-SIDE PRIME

4" P (100) <1 OHM-CM. 450-500 MIC. 2-SIDE PRIME

4" N (100) <1 OHM-CM. 475-575 MIC. 1-SIDE PRIME

4" N (100) <1 OHM-CM. 450-500 MIC. 2-SIDE PRIME

GERMANIUM

ALL GERMANIUM IS PRIME GRADE

2" UNDOPED Ge (100) >40 OHM-CM. 300-350 MICRONS 1-SIDE PRIME- NO FLATS

2" P/Ga (100) .01-.04 OHM-CM. 350-400 MICRONS 1-SIDE PRIME- NO FLATS

3" P/Ga (111) <.04 OHM-CM. 225-275 MICRONS 1-SIDE PRIME-> 1 FLAT<110>

3" N/Sb (100) .005-.02 OHM-CM 100-150 MICRONS 1-SIDE PRIME- NO FLATS

4" N (100) <1 OHM-CM. 1-SIDE PRIME- 1 FLAT

GALLIUM ARSENIDE

GaAs WAFERS-MECHANICAL GRADE (MINIMUM ORDER- 5 WAFERS)

2" (100) N/Si 0.0009-0.0026 OHM-CM.. 300-350 MIC. ONE FLAT<110> 1-SIDE TEST

3" (100) N-type OHM-CM. 500-600 MIC. TWO FLATS <110> 1-SIDE TEST

4" (100) SI Undoped OHM-CM. 500-600 MIC. TWO FLATS <110> 1-SIDE TEST

6" (100) SI Undoped OHM-CM. 600-700 MIC. NOTCH <110> 1-SIDE TEST

OUR TEST GRADE GaAs WAFERS ARE NOT SUITABLE FOR EPITAXIAL GROWTH

OUR TEST GRADE GaAs WAFERS ARE USED MAINLY FOR TESTS AND SET-UPS

GaAs WAFERS- PRIME/EPI GRADE (MINIMUM ORDER- 1 WAFER)

PLEASE INCLUDE ALL REQUIRED SPECS:

ORIENTATION, TYPE, DOPANT, CARRIER CONCENTRATION, ETCH PIT DENSITY, SURFACE FINISH, DIAMETER & THICKNESS.

2" GaAs

3" GaAs

3 - 5 WAFERS (GaP, GaSb, GaN, InAs, InP, InSb)

PLEASE INCLUDE ALL REQUIRED SPECS:

ORIENTATION, TYPE, DOPANT, CARRIER CONCENTRATION, ETCH PIT DENSITY, SURFACE FINISH, DIAMETER, & THICKNESS.

2" GaP 2" InSb

2" InP 2" InAs

2" GaSb

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