Mass Flowmeters and Controllers, Flow Meter
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Standard Mass Flow Controller MODEL 3660 SERIES High-grade Mass Flow Controller MODEL 3200 SERIES
Low-cost Metal Sealed Mass Flow Meter/Controller MODEL 5400 SERIES Thermal Mass Flow Controllers MODEL 5100 SERIES
Auto Pressure Controllers MODEL 9100 SERIES High-grade Mass Flow Meter MODEL 3100 SERIES
Low-cost Mass Flow Sensor MODEL 3810S SERIES Low-cost Digital Mass Flow Meter MODEL D3810 SERIES
Small Karman Vortex Flow Meter for Liquids FM0101/0102/0103/0105 SERIES Small Karman Vortex Flow Meter FM31(TEFLON/PFA) SERIES
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Check to see which best fit your needs. If you have any questions, please call for assistance at 1-800-790-7837 or e-mail
  Flow Meters, and Controllers, Flowmeters
High-grade Mass Flow Meter
|      Features     |     Standard Specification     |     Harness Layout     |

Model 3100 Series Mass Flow Meter is a new,advanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability.



  • Equipped with a temperature follow-up type current difference detection flow sensor(patent applied for)to ensure high accuracy and quick response
  • Compatible with various types of gases thanks to the incorporated CF switching feature.
  • Control of minute flows available up to 1 sccm full scale(SR option)
Standard Specifications
Flow range(at N2 calibration conditions) 10 sccm to 20 slm(30-100slm)
Response 1 sec. or less to within ±2% of full scale of final value typical for 0-100% response
Accuracy Within±1.0%F.S.(Within±1.5%F.S.)
Linearity Within±0.5%F.S.
Repeatability Within±0.2%F.S.
Proof pressure 980kPa
Leak rate 1X10-8 Pa.m3/s or less
Working temperature range 0 to 50°C(Accuracy guarantee;0 to 50°C)
Materials of parts exposed to gases Body:SUS 316L,SUS 316,PTFE
Seals:VitonTM (Optional:NeopreneTM)
Joint Standard:1/4SWL(3/8SWL)
Electrical connections* Dsub 9-pin male connector per KFC standard(SEMI standard)
Flow rate output signals* 0~5VDC
Required power supply* +15VDC(±5%)100mA,-15VDC(±5%)100mA
*Values indicated in () are for Model 3105.
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No. Signal Pin No. Signal
1 NC 6 NC
2 Flow output 0-5V 7 Flow output COM
3 +15 VDC Power source 8 NC
4 Power source COM 9 NC
5 -15 VDC Power source    
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For further information, please contact NetMotion, Inc. at 1.800.790.7837 or 510.578.2814 or e-mail
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