| Mass Flowmeters and Controllers, Flow Meter |
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| Flow Meters, and Controllers, Flowmeters |
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High-grade Mass Flow Meter
MODEL 3100 SERIES |
| | Features | Standard Specification | Harness Layout | |
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Model 3100 Series Mass Flow Meter is a new,advanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability.
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| Features |
- Equipped with a temperature follow-up type current difference detection flow sensor(patent applied for)to ensure high accuracy and quick response
- Compatible with various types of gases thanks to the incorporated CF switching feature.
- Control of minute flows available up to 1 sccm full scale(SR option)
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| Standard Specifications |
| Flow range(at N2 calibration conditions) |
10 sccm to 20 slm(30-100slm) |
| Response |
1 sec. or less to within ±2% of full scale of final value typical for 0-100% response |
| Accuracy |
Within±1.0%F.S.(Within±1.5%F.S.) |
| Linearity |
Within±0.5%F.S. |
| Repeatability |
Within±0.2%F.S. |
| Proof pressure |
980kPa |
| Leak rate |
1X10-8 Pa.m3/s or less |
| Working temperature range |
0 to 50°C(Accuracy guarantee;0 to 50°C) |
| Materials of parts exposed to gases |
Body:SUS 316L,SUS 316,PTFE
Seals:VitonTM (Optional:NeopreneTM) |
| Joint |
Standard:1/4SWL(3/8SWL)
Optional:1/8SWL,1/4VCRTM,1/4RC |
| Electrical connections* |
Dsub 9-pin male connector per KFC standard(SEMI standard) |
| Flow rate output signals* |
0~5VDC |
| Required power supply* |
+15VDC(±5%)100mA,-15VDC(±5%)100mA |
*Values indicated in () are for Model 3105. |
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| Harness Layout |
Pin Assignment of Dsub 9-pin Connector per KFC Standard
| Pin No. |
Signal |
Pin No. |
Signal |
| 1 |
NC |
6 |
NC |
| 2 |
Flow output 0-5V |
7 |
Flow output COM |
| 3 |
+15 VDC Power source |
8 |
NC |
| 4 |
Power source COM |
9 |
NC |
| 5 |
-15 VDC Power source |
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Click
below to request for a quotation:
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| For
further information, please contact NetMotion, Inc. at 1.800.790.7837
or 510.578.2814 or e-mail sales@netmotion.com
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| Copyright © 2007 NetMotion,
Inc. |
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