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Auto Pressure Controllers
MODEL 9100 SERIES |
| | Features | Standard Specification | Harness Layout | |
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An Auto Pressure Controller(APC)model incorporates a pressure sensor for control of pressure. Model 9100 Series features a KOFLOC solenoid valve whose performance is highly appreciated by customers. By changing the sensor set point,this valve readily permits pressure control both at inlet and at outlet so that it can provide high process performance when used as a single control device or in combination with other mass flow controller
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| Features |
- Improved control and response performance in every flow range
- Switching between two response speeds
- Use of a normally closed solenoid valve
- Reduced dead volume thanks to the diaphragm seat valve
- Spacing and body dimensions are designed so taht the product is compatible with other manufactures' controllers.
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| Standard Specifications (Model 9100 Series) |
| Measurement system |
Vacuum evaporation type semiconductor strain gauge |
| Valve type |
Normally closed solenoid diaphragm valve |
| Control range |
Gauge pressure type:10-500 kPa;
Absolute pressure type:10-300 kPa(A) |
| Response time 1 |
3 sec. or less for 0-100% response |
| Response time 2 |
8 sec. or less for 0-100% response
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| Pressure regulating valve flow rate |
0.5 slm/1 slm/2 slm(Pressure conditions:at primary pressure of 50 kPa,at secondary pressure open to atmospheric air,and at N2 calibration conditions,respectively) |
| Pressure control accuracy |
Within ±1.0%F.S. |
| Accuracy guarantee temperature range |
15°C~35°C |
| Linearity |
Within ±0.5%F.S.
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| Repeatability |
Within ±0.2%F.S.
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| Working temperature range |
0°C~50°C |
| Proof pressure |
Gauge pressure type:1MPa;
Absolute pressure type:450kPa |
| Materials of parts in contact w/gases |
SUS316L,CO-Ni,Au and PTFE |
| Joint |
Standard:Equivalent to 1/4VCRTM;Optional:1/4SWL |
| External leak rate |
6x10-11 Pa.m3/s |
| Pressure input signals |
0.1~5VDC |
| Pressure output signals |
0~5VDC |
| Power supply |
±15 VDC±2%,about 100 mA on positive end and about 200 mA on negative end
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| Mounting position |
Available in any position |
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| Harness Layout |
Pin Assignment of Dsub 9-pin Connector per KFC Standard
| Pin No. |
Signal |
Pin No. |
Signal |
| 1 |
Input valve operation |
6 |
Flow input Hi |
| 2 |
Flow output 0-5V |
7 |
Flow output COM |
| 3 |
+15 VDC Power source |
8 |
Flow input Lo |
| 4 |
Power source COM |
9 |
Output valve voltage |
| 5 |
-15 VDC Power source |
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* Because a differential input system is used for the product,pin 4(Power source COM)is connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
*For baking applications on Model 9100B,working temperature is specified up to 80°C. |
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