Mass Flowmeters and Controllers, Flow Meter
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Standard Mass Flow Controller MODEL 3660 SERIES High-grade Mass Flow Controller MODEL 3200 SERIES
Low-cost Metal Sealed Mass Flow Meter/Controller MODEL 5400 SERIES Thermal Mass Flow Controllers MODEL 5100 SERIES
Auto Pressure Controllers MODEL 9100 SERIES High-grade Mass Flow Meter MODEL 3100 SERIES
Low-cost Mass Flow Sensor MODEL 3810S SERIES Low-cost Digital Mass Flow Meter MODEL D3810 SERIES
Small Karman Vortex Flow Meter for Liquids FM0101/0102/0103/0105 SERIES Small Karman Vortex Flow Meter FM31(TEFLON/PFA) SERIES
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Check to see which best fit your needs. If you have any questions, please call for assistance at 1-800-790-7837 or e-mail
  Flow Meters, and Controllers, Flowmeters
Auto Pressure Controllers
|      Features     |     Standard Specification     |     Harness Layout     |

An Auto Pressure Controller(APC)model incorporates a pressure sensor for control of pressure. Model 9100 Series features a KOFLOC solenoid valve whose performance is highly appreciated by customers. By changing the sensor set point,this valve readily permits pressure control both at inlet and at outlet so that it can provide high process performance when used as a single control device or in combination with other mass flow controller


  • Improved control and response performance in every flow range
  • Switching between two response speeds
  • Use of a normally closed solenoid valve
  • Reduced dead volume thanks to the diaphragm seat valve
  • Spacing and body dimensions are designed so taht the product is compatible with other manufactures' controllers.
Standard Specifications (Model 9100 Series)
Measurement system Vacuum evaporation type semiconductor strain gauge
Valve type Normally closed solenoid diaphragm valve
Control range Gauge pressure type:10-500 kPa;
Absolute pressure type:10-300 kPa(A)
Response time 1 3 sec. or less for 0-100% response
Response time 2 8 sec. or less for 0-100% response
Pressure regulating valve flow rate 0.5 slm/1 slm/2 slm(Pressure conditions:at primary pressure of 50 kPa,at secondary pressure open to atmospheric air,and at N2 calibration conditions,respectively)
Pressure control accuracy Within ±1.0%F.S.
Accuracy guarantee temperature range 15°C~35°C
Linearity Within ±0.5%F.S.
Repeatability Within ±0.2%F.S.
Working temperature range 0°C~50°C
Proof pressure Gauge pressure type:1MPa;
Absolute pressure type:450kPa
Materials of parts in contact w/gases SUS316L,CO-Ni,Au and PTFE
Joint Standard:Equivalent to 1/4VCRTM;Optional:1/4SWL
External leak rate 6x10-11 Pa.m3/s
Pressure input signals 0.1~5VDC
Pressure output signals 0~5VDC
Power supply ±15 VDC±2%,about 100 mA on positive end and about 200 mA on negative end
Mounting position Available in any position
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No. Signal Pin No. Signal
1 Input valve operation 6 Flow input Hi
2 Flow output 0-5V 7 Flow output COM
3 +15 VDC Power source 8 Flow input Lo
4 Power source COM 9 Output valve voltage
5 -15 VDC Power source    
* Because a differential input system is used for the product,pin 4(Power source COM)is connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
*For baking applications on Model 9100B,working temperature is specified up to 80°C.
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For further information, please contact NetMotion, Inc. at 1.800.790.7837 or 510.578.2814 or e-mail
Copyright © 2007 NetMotion, Inc.