Mass Flowmeters and Controllers, Flow Meter
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Standard Mass Flow Controller MODEL 3660 SERIES High-grade Mass Flow Controller MODEL 3200 SERIES
Low-cost Metal Sealed Mass Flow Meter/Controller MODEL 5400 SERIES Thermal Mass Flow Controllers MODEL 5100 SERIES
Auto Pressure Controllers MODEL 9100 SERIES High-grade Mass Flow Meter MODEL 3100 SERIES
Low-cost Mass Flow Sensor MODEL 3810S SERIES Low-cost Digital Mass Flow Meter MODEL D3810 SERIES
Small Karman Vortex Flow Meter for Liquids FM0101/0102/0103/0105 SERIES Small Karman Vortex Flow Meter FM31(TEFLON/PFA) SERIES
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Check to see which best fit your needs. If you have any questions, please call for assistance at 1-800-790-7837 or e-mail
  Flow Meters, and Controllers, Flowmeters
Thermal Mass Flow Controllers
|      Features     |     Standard Specification     |     Harness Layout     |

Being the successor of Model 3440 that has been favorably received by many customers,Model 5100 Series Mass Flow Controller is a multi-range type model provided with improved basic performance features. While,in appearance,it is a conventional mass flow controller,it provides many sophisticated features;particularly,its advanced sensor drive system minimizes zero drift,one of the characteristic features of the predecessor model so acclaimed by customers,so that improved response can be obtained in low ranges.

  • Improved control and response performance in every flow range
  • Improved performance to follow up set voltage(compatible with voltage ramping specification)
  • Range shift function to meet the multi-range requirement
  • Optimized valve to maximize the control resolution in each range
Standard Specifications (5100)
Flow range 10 to 5 slm F.S.;10 to 20 slm F.S.
Valve type Diaphragm valve(Normally closed solenoid)
Control range 1.5 sec. or less to within ±2% of full scale of final value typical for 0-100% response
Accuracy Within±1.0%F.S.
Linearity Within±0.5%F.S.
Repeatability Within±0.2%F.S.
Working temperature range 0 to 50°C(Accuracy guarantee:15 to 35°C)
Operating differential pressure F.S.≤5SLM 49kPa~294kPa
Proof pressure 980kPa
Materials of parts in contact w/gases SUS316L,Au or PTFE
Joint Standard;Equivalent to 1/4VCRTMOptional;1/4SWL
External leak integrity 1x10-11Pa.m3/s(He) or less
Input signals 0~5VDC
Output singnals 0~5VDC
Power supply ±15VDC±15%,about 100 mA on positive end and about 200 mA on negative end
Mounting position Available in any position
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No. Signal Pin No, Signal
1 Input valve operation 6 Flow input Hi
2 Flow output 0-5V 7 Flow output COM
3 +15 VDC Power source 8 Flow input Lo
4 Power source COM 9 Output valve voltage
5 -15 VDC Power source    
* Because a differential input system is used for the product,pin 4(Power source COM)is connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
* For baking applications on Model 5100B,working temperature is specified up to 80°C.
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For further information, please contact NetMotion, Inc. at 1.800.790.7837 or 510.578.2814 or e-mail
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