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Thermal Mass Flow Controllers
MODEL 5100 SERIES |
| | Features | Standard Specification | Harness Layout | |
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Being the successor of Model 3440 that has been favorably received by many customers,Model 5100 Series Mass Flow Controller is a multi-range type model provided with improved basic performance features. While,in appearance,it is a conventional mass flow controller,it provides many sophisticated features;particularly,its advanced sensor drive system minimizes zero drift,one of the characteristic features of the predecessor model so acclaimed by customers,so that improved response can be obtained in low ranges.
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| Features |
- Improved control and response performance in every flow range
- Improved performance to follow up set voltage(compatible with voltage ramping specification)
- Range shift function to meet the multi-range requirement
- Optimized valve to maximize the control resolution in each range
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| Standard Specifications (5100) |
| Flow range |
10 to 5 slm F.S.;10 to 20 slm F.S. |
| Valve type |
Diaphragm valve(Normally closed solenoid) |
| Control range |
1.5 sec. or less to within ±2% of full scale of final value typical for 0-100% response |
| Accuracy |
Within±1.0%F.S. |
| Linearity |
Within±0.5%F.S. |
| Repeatability |
Within±0.2%F.S. |
| Working temperature range |
0 to 50°C(Accuracy guarantee:15 to 35°C) |
| Operating differential pressure |
F.S.≤5SLM 49kPa~294kPa
5<> |
| Proof pressure |
980kPa |
| Materials of parts in contact w/gases |
SUS316L,Au or PTFE |
| Joint |
Standard;Equivalent to 1/4VCRTMOptional;1/4SWL |
| External leak integrity |
1x10-11Pa.m3/s(He) or less |
| Input signals |
0~5VDC |
| Output singnals |
0~5VDC |
| Power supply |
±15VDC±15%,about 100 mA on positive end and about 200 mA on negative end |
| Mounting position |
Available in any position |
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| Harness Layout |
Pin Assignment of Dsub 9-pin Connector per KFC Standard
| Pin No. |
Signal |
Pin No, |
Signal |
| 1 |
Input valve operation |
6 |
Flow input Hi |
| 2 |
Flow output 0-5V |
7 |
Flow output COM |
| 3 |
+15 VDC Power source |
8 |
Flow input Lo |
| 4 |
Power source COM |
9 |
Output valve voltage |
| 5 |
-15 VDC Power source |
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* Because a differential input system is used for the product,pin 4(Power source COM)is connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
* For baking applications on Model 5100B,working temperature is specified up to 80°C. |
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