Mass Flowmeters and Controllers, Flow Meter
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Standard Mass Flow Controller MODEL 3660 SERIES High-grade Mass Flow Controller MODEL 3200 SERIES
Low-cost Metal Sealed Mass Flow Meter/Controller MODEL 5400 SERIES Thermal Mass Flow Controllers MODEL 5100 SERIES
Auto Pressure Controllers MODEL 9100 SERIES High-grade Mass Flow Meter MODEL 3100 SERIES
Low-cost Mass Flow Sensor MODEL 3810S SERIES Low-cost Digital Mass Flow Meter MODEL D3810 SERIES
Small Karman Vortex Flow Meter for Liquids FM0101/0102/0103/0105 SERIES Small Karman Vortex Flow Meter FM31(TEFLON/PFA) SERIES
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Check to see which best fit your needs. If you have any questions, please call for assistance at 1-800-790-7837 or e-mail
  Flow Meters, and Controllers, Flowmeters
Low-cost Metal Sealed Mass Flow Meter/Controller
|      Features     |     Standard Specification     |     Harness Layout     |

Model 5400 Series Mass Flow Meter/Controller features weldless structure,metal seals,accuracy of ≤±1%,response of ≤±1 second and other basic performance conditions required for semiconductor process control,and additionally,has achieved a significant price reduction. Model 5410 Series of the same body design are also lined up.



  • Equipped with a temperature follow-up type current difference detection flow sensor(patent applied for)to ensure high accuracy and high-speed response
  • Use of a normally closed solenoid valve
  • Weldless construction and metal seals provides low leakage.
  • Reduced dead volume thanks to the diaphragm seat valve
  • Spacing,body dimensions and harness layout are designed so that the product is compatible with other manufacturers' controllers.
Standard Specifications
Flow range(at N2 calibration conditions) 10 sccm to 20slm
Valve type* Normally closed solenoid diaphram seat valve
Control range* 2%-100%F.S.
Response* 1 sec. or less to within±2% of the set point typical for 0-100% response
QS option provides 1 sec. or less for 0-100% to 0-20% responses.
Accuracy Within±1.0%F.S.
Linearity Within±0.5%F.S.
Repeatability Within±0.2%F.S.
Operating differential pressure* F.S.≤5SLM 49kPa-294kPa
*Low differential pressure specification depends on types of gas and flow rates to be used.
5<F.S.≤20SLM 147kPa~294kPa
Proof pressure 980kPa
Leak rate 1X10-11 Pa.m3/s or less
Working temperature range 0 to 50°C(Accuracy guarantee:15 to 35°C)
Materials of parts in contact w/gases Body:SUS316L
Valve seat:PTFE
Joint Equivalent to 1/4VCRTM
Electrical connections* Dsub 9-pin male connector per KFC standard(SEMI standard)
Flow rate input signals* 0~5VDC
Flow rate output signals 0~5VDC
Power supply requirement 5400:+15VDC(±5%) 100mA,-15VDC(±5%) 200mA
5410:+15VDC(±5%) 100mA,-15VDC(±5%) 200mA
  *Items marked with an asterisk(*) are those applicable to Model 5400 only.
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No. Singnal Pin No. Signal
1 Input valve operation 6 Flow input Hi
2 Flow output 0-5V 7 Flow output COM
3 +15 VDC Power source 8 Flow input Lo
4 Power source COM 9 Output valve voltage
5 -15 VDC Power source    
* Because a differential input system is used for the product,pin 4(Power source COM)and pin 7(Flow output COM)are connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
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For further information, please contact NetMotion, Inc. at 1.800.790.7837 or 510.578.2814 or e-mail
Copyright © 2007 NetMotion, Inc.