Mass Flowmeters and Controllers, Flow Meter
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Standard Mass Flow Controller MODEL 3660 SERIES High-grade Mass Flow Controller MODEL 3200 SERIES
Low-cost Metal Sealed Mass Flow Meter/Controller MODEL 5400 SERIES Thermal Mass Flow Controllers MODEL 5100 SERIES
Auto Pressure Controllers MODEL 9100 SERIES High-grade Mass Flow Meter MODEL 3100 SERIES
Low-cost Mass Flow Sensor MODEL 3810S SERIES Low-cost Digital Mass Flow Meter MODEL D3810 SERIES
Small Karman Vortex Flow Meter for Liquids FM0101/0102/0103/0105 SERIES Small Karman Vortex Flow Meter FM31(TEFLON/PFA) SERIES
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Check to see which best fit your needs. If you have any questions, please call for assistance at 1-800-790-7837 or e-mail
  Flow Meters, and Controllers, Flowmeters
High-grade Mass Flow Controller MODEL 3200 SERIES
|      Features     |     Standard Specification     |     Harness Layout     |

Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manufacture of semiconductors, LCDs, combustion equipment,analytical devices,and biotechnology fields. Its high performance is equal to a new standared.


  • Equipped with a temperature follow-up type current difference detection flow sensor(patent applied for) to ensure high accuracy and high-speed response
  • Use of a normally closed valve to ensure safety
  • Can be used for control of various types of gases thanks to the incorporated CF switching feature.
  • Reduced dead volume thanks to the diaphragm seat valve
  • Control of small quantities of flows available up to 1 sccm full scale(SR option)
  • Low differential pressure type control available for combustible gases(LP option)
Standard Specifications
Flow range(at N2 calibration conditions) 10 sccm to 20 slm
Valve type Normally closed solenoid diaphragm seat valve
Control range 2%~100%F.S.
Response 1 sec. or less to within±2% of full scale of final value typical for 0-100% response
Accuracy Within±1.0%F.S.
Linearity Within±0.5%F.S.
Repeatability Within±0.2%F.S.
Operating differential pressure F.S.≤5SLM 49kPa~294kPa
*Low differential pressure specification depends on types of gas and flow rates to be used.
5<F.S.≤20SLM 98kPa~294kPa
Proof pressure 980kPa
Leak rate 1X10-8 Pa.m3/s or less
Working temperature range 0 to 50°C(Accuracy guarantee;0 to 50°C)
Materials of parts in contact w/gases Body:SUS316L
Valve seat:PTFE
Seals:VitonTM(Optional:NeopreneTM or NBR)
Joint Standard:1/4SWL
Electrical connections* Dsub 9-pin male connector per KFC standard(SEMI standard)
Flow rate input signals 0~5VDC
Flow rate output signals* 0~5VDC
Required power supply* +15VDC(±5%) 100mA,-15VDC(±5%) 200mA
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin no. Signal Pin No. Signal
1 Input valve operation 6 Flow input Hi
2 Flow output 0-5V 7 Flow output COM
3 +15 VDC Power source 8 Flow input Lo
4 Power source COM 9 NC
5 -15 VDC Power source  
Because a differential input system is used for the product,pin 4(Power source COM) and pin 7(Flow output COM)are connected inside the mass flow controller while pin 8(Flow input Lo)is isolated. In case of a single-ended connection,connect pin 8 to pin 4.
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For further information, please contact NetMotion, Inc. at 1.800.790.7837 or 510.578.2814 or e-mail
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