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| Features |
- Capable of measuring ultra-minute flows
Can measure a wide range of flows from ultra-minute flows of 0.5-3ml/min to flows of 3-30l/min.
- High precision measurement
High precision measurement of flows is available up to±2% of full scale (standard specification)or to±1% of full scale(optional specification).
- Wide variations
A broad range of variations is available in total length,materials of construction,flow rate,pressure,scale,and so forth to meet diverse applications from a variety of fields.
- Capable of measuring all kinds of gases
Practically all kinds of gases can be measured,not to mention those standard(Air,N2,O2,H2,He,Ar and CO2).
- Measurement of water flows also possible
Measurement of full-scale water flows not exceeding 1l/min is also possible.(Dimensions may vary depending upon the specified maximum flow rate.)
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Applications
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- For integration into your equipment panel
- For flow inspections at laboratory
- For semiconductor manufacturing equipment
- For biotechnology industries
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| Standard Specifications |
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Gases |
Liquids |
| Fluids |
Air,N2,O2,H2,He,Ar,and CO2
iCalibration by actual gasj
For other gases,consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
*Optional:Scale indicating two types of fluids |
Standard fluid:Water
For other liquids,consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used. |
| Flow range |
0.5-5ml/min to3-30l/min
(See the Capacity Table below.)*Optional:0.5-3ml/min |
0.5-5ml/min to0.1-1l/min
(See the Capacity Table below.)*Optional:0.5-3ml/min |
| Accuracy |
FS±2%(Measurement point)
*Optional:FS±1%(Measurement point) |
FS±2%(Measurement point) |
| Proof pressure |
1.0MPa for 100ml/min or less
0.7MPa for 5 l/min or less
0.5MPa for 10 l/min or more |
1.0MPa for 100ml/min or less
0.5MPa for 300 ml/min or more |
| Available scale |
10:1 *Optional:20:1 |
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| Materials |
SS |
BS |
| Body block |
SUS316 |
Brass |
| Tapered tube |
Pyrex |
| Packing |
Viton |
NBR |
| Float |
Pyrex,SUS316 |
| Protective cover |
Acrylic resin |
| Heat resistance |
120°C |
70°C |
| Connection end |
Rc1/4(Standard);Rc1/8(Optional) |
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