| |
|
| Features |
- Compact design
- Economical
- Very small in size
- Wide variations
|
Applications
|
- For environmental instrumentation systems
- For general instruments for analysis
- For purge systems
- For semiconductor manufacturing equipment
|
| |
| Standard Specifications |
| Fluids |
Air,N2,O2,H2,He,Ar,and CO2
iCalibration by actual gasj
For other gases,consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
|
| Flow range(Full scale) |
1L,2L,3L,5L,10L,15L,20L/MIN |
| Accuracy |
FS±5%(Measurement point)
|
| Proof pressure |
0.8MPa for 5L/MIN or less
0.5MPa for 10 L/MIN or more |
| Available scale |
10:1 |
| - |
|
|
| Materials |
S |
BS |
| Body block and some other components |
SUS303,SUS304 |
Brass |
| Tapered tube |
Pyrex |
| Packing |
Viton |
NBR |
| Float |
Pyrex,SUS316 |
| Protective cover |
Acrylic resin |
| Heat resistance |
120°C |
70°C |
| Connection end |
Rc1/8(Standard);Rc1/4(Optional) |
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