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| Features |
- Superior stability
Superior stability is ensured through antistatic measures and using the same try-flat,rib-guid glass tube as that used for high precision models.
- Economical
Economy and reduced period of shipping achieved through our all-out effort at process streamlining such as introduction of mass production system using advanced printing technology.
- Super-compact
Space-saving as its total length ranges from 84 mm to 154mm.
- Wide variations
A broad range of variations is available in maximum flow rate,total length and materials of construction to meet diverse applications from a variety of fields.
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| Applications |
- For integration into equipment panel
- For gas purge system
- For measurement of welding gas flows
- For various types of analyzers
- For semiconductor manufacturing equipment
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| Standard Specifications and Length Designations |
| Fluids |
Air,N2,O2,H2,He,Ar,and CO2
iCalibration by actual gasj
For other gases,consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
*Optional:Scale indicating two types of fluids |
| Flow range |
100ML,150ML,200ML,300ML,500ML/MIN,1L,2L,3L,5L,10L,15L,20L./MIN |
| Accuracy |
FS±5%(Measurement point)
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| Proof pressure |
0.8MPa for 5l/min or less
0.5MPa for 10 l/min or more |
| Available scale |
10:1 |
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| Materials |
S |
BS |
| Body block and some other components |
SUS303,SUS304 |
Brass |
| Tapered tube |
Pyrex |
| Packing |
Viton |
NBR |
| Float |
Pyrex,SUS316 |
| Protective cover |
Acrylic resin |
| (Heat resistance) |
120°C |
70°C |
| Connection |
Rc1/8(Standard),Rc1/4(Optional special joint) |
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