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| Features |
- Capable of controlling ultra-minute flows
Can respond to a wide range of flows from ultra-minute flows of 0.5-3 ml/min to flows of 3-30 l/min.
- The incorporated precision needle valve allows a delicate control of flows.
The effective revolving speed of the needle valve can be maximized by specifying a maximum flow and normal supply pressure.
- Wide variations
Four total lengths of the flowmeter are available:126,156,206,and 256 mm,for your selection according to your needs.
- Two types of valve arrangement
The needle valve can be laid out either at the top or at the bottom of the meter.Choose the type that best suits your needs.
- Measurement and control of water flows also possible
Measurement and control of water flows not exceeding 1l/min are also possible.
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Applications
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- For integration into your equipment panel
- For gas devices to be used on the semiconductor manufacturing site
- For biotechnology industries
- For vacuum line control
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| Standard Specifications |
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Gases |
Liquids |
| Fluids |
Air,N2,O2,H2,He,Ar,and CO2
(Calibration by actual gas)
For other gases,consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
*Optional:Scale indicating two types of fluids |
Standard fluie:Water
For other liquids,consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used. |
| Flow range |
0.5-5ml/min to3-30l/min
(See the Capacity Table below.)*Optional:0.5-3ml/min |
0.5-5ml/min to 0.1-1l/min
(See the Capacity Table below.)*Optional:0.5-3ml/min |
| Accuracy |
FS±2%(Measurement point)
*Optional:FS±1%(Measurement point) |
FS±2%(Measurement point) |
| Proof pressure |
1.0MPa for 100ml/min or less
0.7MPa for 5 l/min or less
0.5MPa for 10 l/min or more |
1.0MPa for 100ml/min or less
0.5MPa for 300 ml/min or more |
| Available scale |
10:1 *Optional:20:1 |
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| Materials |
SS |
BS |
| Body block |
SUS316 |
Brass |
| Tapered tube |
Pyrex |
| Packing |
Viton |
NBR |
| Float |
Pyrex,SUS316 |
| Protective cover |
Acrylic resin |
| Heat resistance |
120°C |
70°C |
| Connection end |
Rc1/4(Standard);Rc1/8(Optional) |
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